引发式化学气相沉积系统iCVD

Initiated Chemical Vapor Deposition

       引发式化学气相沉积（iCVD），方法是一种绿色新型的功能高分子薄膜制备方法。结合传统的液相自由基聚合反应与化学气相沉积技术，iCVD方法将聚合所需的引发剂和功能单体气化引入腔体，在较低加热温度下诱导引发剂裂解，使单体聚合成高分子薄膜沉积于基底上。沉积过程中基底温度控制在室温范围，因此不会伤害其性能。与传统液相制备过程相比，iCVD法制得薄膜致密均匀、厚度可控，且适用于任何材质的基底；与PECVD等高能气相法相比，其条件温和、过程可控，且可完美保留所需官能团。

The iCVD Coating System is a research & development level polymer chemical vapor deposition coating system specifically designed to bring polymer vapor deposition technology to the laboratory. This coating system is an excellent choice for research institutions and universities looking to develop and design with the emerging leader in thin polymer coating technology.

Our customers can depend on decades of expertise with polymer vapor deposition technology, between our commercial success and our leadership's academic experience, to provide a research or educational tool that grants the greatest range of possibility for coating development utilizing a recipe-driven, easy-to-use, automated system. With a variety of options available to enhance the coating system or allow for a greater variety of polymer compositions, we will work with you to decide the right system for your needs. We can offer full-service support ranging from the sale of a standalone system to design, installation, training, support, and licensing for custom applications.

Features

·      Intuitive PC-based control system

·      Custom stainless steel vacuum chamber with temperature controlled stage

·      Tensioned hot filament array

·      Automatic pressure control 

·      Heated precursor delivery system with automatic temperature control and optional automatic flow control

·      Real time thickness measurement

·      Fully contained in vented enclosure

·      Oil-sealed rotary vane vacuum pump with foreline trap and outlet mist filter

Options

·      Additional precursor feed lines

·      Low-volatility precursor delivery system

·      Safety and Automation Package

·      In-situ thickness measurement via quartz crystal microbalance (QCM)

·      Programmable DC Power Supply for filament heating

·      Dry pumping system

·      Extended service and support agreements

·      On-site training

Applications

·      Biomedical

·      Microfluidics

·      Nanotechnology

·      Undergraduate unit operations labs

·      Academic research labs 

·      Government labs